Structure having plural conductive regions and process for production thereof
AssigneeCanon Kabushiki Kaisha
InventorsAtsushi Kandori, Chienliu Chang, Makoto Takagi
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Abstract
A structure having a plurality of conductive regions insulated electrically from each other comprises a movable piece supported movably above the upper face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region, the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves.
Claims6
A structure having a plurality of conductive regions insulated electrically from each other, comprising
- a movable piece supported movably above the upper face of the conductive region,
- the movable piece having an electrode in opposition to the conductive region,
- the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region,
- the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves.
A process for producing a structure in a shape of a substrate having conductive regions, functioning as electric wirings in a thickness direction and being insulated electrically from each other, comprising steps of:
- forming through-holes or grooves at intervals through or on a base material of the substrate, and
- oxidizing thermally the base material at least at an inside face of the through-holes or grooves to form a sequentially connected oxidized regions to form plural conductive regions insulated electrically from each other.
Dependencies are inferred from the claim text.