Procedure for increasing the long-term stability of transport aids
AssigneeSchott Solar AG
InventorsJoerg HORZEL, Gabriele BLENDIN
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Abstract
The invention is related to a procedure for the heat treatment of semiconductor elements, which are fed through a process chamber in the continuous-flow procedure. With it, ceramic transport aids used for the transport of the semiconductor elements demonstrate a clearly better long-term mechanical stability compared with known procedures; it is proposed that at least, by way of example, one specific humid atmosphere be adjusted in the process chamber.
Claims34
A procedure for increasing the long-term mechanical stability of transport aids, by means of which semiconductor elements are fed for heat treatment through a process chamber in a continuous-flow process, comprising using ceramic materials as a transport aid, and exposing the ceramic materials specifically to a moist atmosphere in the process chamber open to the outside atmosphere, in which heat treatment in the process chamber is performed at a temperature T≧500° C.
Dependencies are inferred from the claim text.