Scanning Probe Microscope having Improved Optical Access
AssigneeAgilent Technologies, Inc.
InventorJames Robert Massie
Life of this patent
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AssigneeAgilent Technologies, Inc.
InventorJames Robert Massie
Estimating the term…
A scanning probe microscope and method for using the same are disclosed. The Scanning probe microscope includes a probe mount for connecting a cantilever arm and a probe signal generator. The probe position signal generator generates a position signal indicative of a position of the probe relative to one end of the cantilever arm. The probe position signal generator includes a first light source that directs a light beam at a first reflector positioned on the cantilever arm and a detector that detects a position of the light beam after the light beam has been reflected from the first reflector. A second reflector reflects the light beam after the light beam is reflected from the first reflector and before the light beam enters the detector, the second reflector passing light from a second light source that illuminates the sample.
A scanning probe microscope comprising:
A method for forming an image of a sample, said method comprising:
Dependencies are inferred from the claim text.