Plasma Spraying and Recrystallization of Thick Film Layer
AssigneeIntegrated Photovoltic, Inc.
InventorsRaanan Zehavi, Sharone Zehavi, Lawrence Hendler, Tatyana Dulkin
Life of this patent
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Abstract
A linear process tool comprising at least two deposition modules each comprising one or more plasma spray guns operable to move in a direction approximately orthogonal to the direction of a substrate carrier is configured to deposit at least a first and second layer, in direct contact with each other, wherein a first layer is of first composition and the second layer is of second composition different than the first composition.
Claims13
A linear process tool comprising;
- first and second deposition modules each comprising one or more plasma spray guns operable to move in a direction approximately orthogonal to the direction of motion of a substrate carrier;
- wherein the first deposition module is configured to deposit a first layer on a substrate on the substrate carrier and the second deposition module is configured to deposit a second layer in direct contact with the first layer on the substrate on the substrate carrier such that the first layer is of first composition and the second layer is of second composition different than the first composition;
- wherein the plasma spray guns comprise components exposed to the plasma stream comprising at least one constituent of the primary source material in the plasma stream;
- wherein the primary source of materials for the plasma spray guns for the deposited layers is a first and second powder of first and second compositions produced by jet mills wherein the substrate carrier conveys the substrate from an entrance of the linear process tool to an exit at a predetermined speed.
A method for making a structure comprising first layer of first composition and second layer of second composition in contact wherein the first composition is different from the second composition comprising the steps:
- depositing the first layer on a transported substrate with a first plasma spray gun operable to move in a direction approximately orthogonal to the transported direction;
- and
- depositing the second layer on the transported substrate with a second plasma spray gun operable to move in a direction approximately orthogonal to the transported direction;
- wherein the first plasma spray gun comprises components exposed to the plasma stream comprising at least one constituent of a first primary source material in the plasma stream;
- wherein the first primary source material for the first plasma spray gun for the first layer is a first powder of the first composition produced by jet mills;
- wherein the second plasma spray gun comprises components exposed to the plasma stream comprising at least one constituent of a second primary source material in the plasma stream;
- wherein the second primary source material for the second plasma spray gun for the second layer is a second powder of the second composition produced by jet mills.
Dependencies are inferred from the claim text.