Current leadthrough for a vacuum pump
AssigneeOerlikon Leybold Vacuum GmbH
InventorHeinrich Englaender
Life of this patent
Estimating the term…
Abstract
The vacuum pump comprises a casing (10) closed by a vacuum cover (20). Between an end wall (14) of the casing (10) and the vacuum cover (20), a circuit board (16) is arranged for current feedthrough. The circuit board (16) is sealed by two sealing elements (15, 21) of different diameters so that an annular partial region (22) is on its outer side subjected to the atmospheric pressure and is on its inner side subjected to the vacuum. It is avoided that the circuit board (16) laterally projects beyond the contour of the casing (10).
Claims15
A vacuum pump comprising a vacuum-tight casing, said casing accommodating a motor and a pump rotor and being provided with a pump inlet and a pump outlet, said pump further comprising a current feedthrough, said current feedthrough including a circuit board, an inner side of said circuit board being arranged in abutment on an end face of the wall of the casing with interposition of a first sealing means, and an outer side of said circuit board being arranged in abutment on a vacuum cover of the casing with interposition of a second sealing means, wherein said first and second sealing means are arranged with a lateral displacement relative to each other so that a partial region of the circuit board is on its outer side subjected to atmospheric pressure and is on its inner side subjected to a generated vacuum.
A vacuum pump comprising:
- a vacuum-tight casing, the casing holding a motor and a pump rotor and defining a pump inlet and a pump outlet;
- a circuit board, an inner side of said circuit board being arranged in abutment on an end face of the casing, and an outer side of said circuit board facing away from the end face of the casing:
- a vacuum cover covering a portion of the outer side of the circuit board and defining a hollow space therebetween;
- a first annular sealing element disposed between the casing end face and the circuit based inner side;
- a second annular sealing element being disposed between the circuit board outer face and the vacuum cover, the second annular sealing element being smaller than the first annular sealing element.
Dependencies are inferred from the claim text.