Arrangement for three-dimensional electron beam tomography

An arrangement for three-dimensional electron beam tomography, comprising:

• means for generating, focusing and deflecting an electron beam within a vacuum chamber,
• a target arranged within the vacuum chamber for decelerating the electron beam and for generating X-ray radiation, which target in turn comprises a target base body and an applied conversion layer,
• an X-ray detector subdivided into a plurality of circular-arc segments and arranged within the vacuum chamber,
• a receiving opening for the examination object,
• electron beam stops arranged within the vacuum chamber and
• a detector collimator arranged within the vacuum chamber,
• characterized in that
• the target is designed as a cylindrical ring tapering in the electron beam direction,
• the target surrounds the receiving opening for the examination object,
• the circular-arc segments of the X-ray detector surround the target on the outside with certain axial distances from one another,
• the electron beam is forced into a spiral path by means of the electron-optical system and thereby generates a spatially spiral-shaped focal-spot path on the inside of the target or the electron beam is successively forced into circular paths with different diameters by means of the electron-optical system and thereby generates a spatial focal-spot path that consists of a multiplicity of circles with different diameters on the inside of the target.