Micromirror Array Assembly with In-Array Pillars

A spatial light modulator for use in a projection system, comprising:

• a micromirror array device, comprising:
• a first substrate having thereon an array of micromirrors;
• a second substrate;
• and
• a plurality of pillars disposed between the substrates such that the first substrate is connected to the second substrate via the micromirror and the pillar for maintaining a uniform gap between the substrates.

A micromirror device, comprising:

• a first substrate;
• a post on the substrate;
• a mirror plate attached to a hinge that is held by the post on the substrate such that the mirror plate rotates on the substrate;
• a pillar on the mirror plate and in connection with the post;
• and
• a second substrate, wherein the second substrate is disposed on the pillar and connected to the pillar such that the distance between the first and second substrate is maintained at a substantially constant value.

A method of making a spatial light modulator, the method comprising:

• forming an array of micromirrors on first substrate;
• providing a second substrate;
• forming a plurality of pillars on the second substrate;
• aligning each pillar with one of the micromirrors;
• and
• bonding the substrates.

A spatial light modulator, comprising:

• an array of micromirrors on a first substrate;
• a second substrate;
• a first sealing material that hermetically bonds the first and second substrates;
• and
• a second sealing material other than the first seal material contracting the first and second substrate for enhancing the hermetic seal with the first sealing material.

A microelectromechanical device, comprising:

• a first and second substrate bonded together;
• an array of MEMS elements formed on the first substrate and disposed between the substrates;
• and
• a plurality of pillars disposed between the second substrate and the MEMS elements.

A method of forming a spatial light modulator for use in a display system, the method comprising:

• forming a plurality of micromirrors on a first substrate, wherein each micromirror has a fixed portion and a movable portion;
• providing a second substrate;
• and
• forming a pillar on the fixed portion of the micromirror and/or on the second substrate.