Three dimensional shape measurement apparatus and method

A method of measuring a three dimensional shape comprising:

• photographing a first image in a first measurement area of a measurement target;
• arithmetically processing the first image by a first central processing unit to produce a three dimensional shape in the first measurement area;
• photographing a second image in a second measurement area of the measurement target while the first central processing unit arithmetically processes the first image;
• and
• arithmetically processing the second image by a second central processing unit to produce a three dimensional shape in the second measurement area.

A method of measuring a three dimensional shape comprising:

• photographing a first image in a first measurement area of a measurement target in a first direction and a second direction;
• photographing a second image in a second measurement area of the measurement target at least in the first direction and the second direction, after photographing the first image;
• and
• dividing the first image into an image corresponding to the first direction and an image corresponding to the second direction and arithmetically processing the divided images by a plurality of central processing units, to produce a three dimensional shape in the first measurement area.

A board inspection apparatus comprising:

• a stage supporting a board;
• a projecting section including a light source and a grating element, the projecting section illuminating a grating pattern light onto the board;
• and
• a camera sequentially opened from a first line to a last line to receive a reflection grating image reflected by the board,
• wherein the grating element is moved for at least time interval for which the camera is opened from the first line to the last line.

A method of inspecting a board by using at least two projecting sections, each of which includes a light source and a grating element, and a camera, the method comprising:

• sequentially opening the camera from a first line to a last line;
• illuminating a grating pattern light onto the board by using a first projecting section of the projecting sections;
• and
• moving a grating element included in at least one second projecting section different from the first projecting section for a predetermined time interval existing between a time at which the last line is opened and a time at which the last line is closed.

A method of inspecting a board comprising:

• loading an inspection board on which a plurality of measurement targets are disposed to an inspection apparatus;
• dividing inspection areas in which the measurement targets are located in a field of view of a camera to acquire image data for each inspection area;
• and
• inspecting shapes of the measurement targets by using the acquired image data for each inspection area.