Multi-layer micro-energy harvester and method of making the same

A multi-layer structure that is at least a portion of an electrostatic energy harvester for extracting and converting ambient vibration energy into electrical energy, comprising:

• (a) at least two variable capacitor layers, each of which comprises at least one fixed electrode, one movable electrode, and at least one spring structure that supports the movable electrode wherein the at least one fixed electrode forms at least one variable capacitor with the movable electrode;
• and
• (b) at least one moving mass layer, each of which comprises at least one moving mass component and a plurality of separate connection components,
• wherein the at least two variable capacitor layers and the at least one moving mass layer are bonded together as desired to form at least one multi-layer variable capacitor comprising at least one multi-layer fixed electrode, one multi-layer movable electrode, and at least one multi-layer spring structure,
• wherein all of the connection components are a portion of the at least one multi-layer fixed electrode and the at least one multi-layer spring structure wherein each of the at least one multi-layer fixed electrode and the at least one multi-layer spring structure comprises at least one connection component,
• wherein all of the moving mass components are a portion of the multi-layer movable electrode, and
• wherein two outermost layers of the bonded layers are two variable capacitor layers.

A multi-layer structure that is at least a portion of an electrostatic energy harvester for extracting and converting ambient vibration energy into electrical energy, comprising:

• (a) a substrate;
• and
• (b) a plurality of separate variable capacitor layers, each of which comprises at least one fixed electrode, one movable electrode, and at least one spring structure that supports the movable electrode, wherein the at least one fixed electrode forms at least one variable capacitor with the movable electrode,
• wherein the plurality of variable capacitor layers are respectively anchored to the substrate and located in different height planes above the substrate by bonding the at least one fixed electrode and the at least one spring structure of each variable capacitor layer to a plurality of separate anchor components as desired wherein the plurality of anchor components are secured to the substrate, and
• wherein the movable electrode of each of the plurality of variable capacitor layers is suspended above the substrate by the at least one spring structure of the same layer.