Vacuum chuck

Abstract

The invention relates to a vacuum chuck capable of reducing cost and weight by making its structure simple and shortening the clamping time. The invention comprises a main body 100 including a support projection 110 and a vacuum groove 111 arranged in a lattice form on the top surface, an installation space 120, a vacuum space 121 and a filter space 122 therein to form a vacuum hole 123 communicating the vacuum groove 111 of the filter space 122 and inlet 130 and outlet 131 communicating with the installation space 120 and vacuum space 121 on both rear sides; an air saving valve B, a vacuum sensor S, a vacuum generator V and a filter F that are installed in the installation space 120, vacuum space 121 and filter space 122 of the main body 100; a pressure gauge 200 and a vacuum gauge 300 communicating with the inlet 130 and vacuum space 121 that are mounted on both front sides of the main body 100; a switch 400 that is installed in the front-middle of the main body 100 to move to and fro so as to open and close the vacuum space 121; a main body cover 500 that is air-tightly coupled to the lower part of the main body 100; and a filter cover 600 that is air-tightly coupled to the lower part of the filter space 122.

Dependencies are inferred from the claim text.