Ultraviolet irradiation device
AssigneeNitto Denko Corporation
InventorsMasayuki Yamamoto, Masaru Irie
Life of this patent
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Abstract
Prior to applying of ultraviolet rays to a surface of a wafer with a protective tape joined thereto that is placed and held on a holding table, an illumination sensor moves to a position below an ultraviolet irradiation unit having ultraviolet light emitting diodes arranged in one dimensional array to measure ultraviolet intensity in a position corresponding to a surface of the protective tape, and output voltage of each diode is controlled so as to maintain a uniform accumulated quantity of light in an area of the protective tape where ultraviolet rays are applied that is determined from the result of measurement and a turning velocity of the holding table.
Claims12
An ultraviolet irradiation device for irradiating with ultraviolet rays an ultraviolet curable protective tape joined to a surface of a semiconductor wafer, comprising:
- a holding table to mount and hold the semiconductor wafer with the protective tape joined thereto;
- a drive mechanism to turn the holding table;
- ultraviolet light emitting diodes arranged at least in a radial direction of the semiconductor wafer;
- and
- a control unit to maintain a uniform accumulated quantity of light in an area of the protective tape where ultraviolet rays are applied upon irradiation of a surface of the protective tape with ultraviolet rays from the ultraviolet light emitting diodes while turning the holding table that places and mounts the semiconductor wafer with the protective tape joined thereto.
Dependencies are inferred from the claim text.