Loading patent…
AssigneeOerlikon Solar IP AG, Trubbach
InventorsPhilipp Wagner, Andreas Meier, Christian Egli
Estimating the term…
A gate valve for a vacuum chamber comprises two carriers (5a) each connected to a frame structure providing an essentially plane front by two parallel links (6) and to an actuating rod (12a) by parallel levers (14). Upward motion of the actuating rods (12a) by a piston (17) causes, via the levers (14), upward motion of the carriers (5a) which is transformed into a circular motion by the links (6) where the carriers (5a) at the same time approach the front while remaining parallel to it, moving sealing plates (9) which are fixed to the carriers (5a) to an active position where they press against the front and seal openings (3) therein. Retraction of the piston (17) effects an inverse motion, whereby the sealing plates (9) are completely removed from the openings (3) and the latter made easily accessible.
1-15. (canceled)
A gate valve for sealing at least one opening in a substantially plane front of a frame structure, comprising at least one carrier extending in a longitudinal direction at a distance from the front and a sealing plate for sealing the at least one opening fixed to the said at least one carrier, the carrier being movable forward and backward parallel to the longitudinal direction over a switching interval and the at least one sealing plate being movable between an active position where it is in contact with a part of the front surrounding the opening, thereby sealing the latter, and an inactive position where it is at a distance from the said front, leaving the opening uncovered, and further comprising mechanical guide means with at least two parallel links offset in the longitudinal direction, each link being connected to the carrier pivotably about an axis extending in a lateral direction which is parallel to the front and perpendicular to the longitudinal direction and configured to be connected to the frame structure pivotably about an axis extending in a lateral direction which is parallel to the front and perpendicular to the longitudinal direction, for the links to guide the at least one carrier such that forward motion causes it to at the same time approach the front, the at least one sealing plate assuming its active position, whereas backward motion causes it to move away from the front, the at least one sealing plate assuming its inactive position.
A vacuum chamber comprising a frame structure with a substantially plane front which surrounds at least one opening and further comprising at least one gate valve for sealing the at least one opening, the gate valve comprising at least one carrier extending in a longitudinal direction at a distance from the front and a sealing plate for sealing the at least one opening fixed to the said at least one carrier, the at least one carrier being movable forward and backward parallel to the longitudinal direction over a switching interval and the at least one sealing plate being movable between an active position where it is in contact with a part of the front surrounding the opening, thereby sealing the latter, and an inactive position where it is at a distance from the said front, leaving the opening uncovered, and further comprising mechanical guide means with at least two parallel links offset in the longitudinal direction, each link being connected to the frame structure and to the carrier pivotably about an axis extending in each case in a lateral direction which is parallel to the front and perpendicular to the longitudinal direction, for the links to guide the at least one carrier such that forward motion causes it to at the same time approach the front, the at least one sealing plate assuming its active position, whereas backward motion causes it to move away from the front, the at least one sealing plate assuming its inactive position.
Dependencies are inferred from the claim text.