Cobalt-iron alloy sputtering target with high pass through flux and method for manufacturing the same
AssigneeSolar Applied Materials Technology Corp.
InventorsShang-Chieh Hou, Hui-Wen Cheng
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Abstract
A cobalt-iron alloy sputtering target is made by melting and casting process and consists of cobalt, iron and additive metal, wherein the cobalt has an increased pass through flux content in the cobalt-iron alloy sputtering target and the additive metal has a content from 8 at % 20 at % and is at least one metal selected from the group consisting of tantalum, zirconium, niobium, hafnium, aluminum and chromium. The cobalt-iron alloy sputtering target has increased pass through flux.
Claims20
A cobalt-iron alloy sputtering target characterized in that:
- the cobalt-iron alloy sputtering target is made by melting and casting process and consists of cobalt (Co), iron (Fe) and from 8 at %˜20 at % additive metal, the cobalt having an increased pass through flux (PTF) content in the cobalt-iron alloy sputtering target, the additive metal being at least one metal selected from the group consisting of tantalum (Ta), zirconium (Zr), niobium (Nb), hafnium (Hf), aluminum (Al) and chromium (Cr).
A method for manufacturing a cobalt-iron alloy sputtering target with high PTF comprising steps of:
- providing a cobalt-iron alloy sputtering target by a melting and casting process, the target consisting of cobalt (Co), iron (Fe) and from 8 at %˜20 at % additive metal, wherein the cobalt has an increased pass through flux (PTF) content in the cobalt-iron alloy sputtering target, the additive metal being at least one metal selected from the group consisting of tantalum (Ta), zirconium (Zr), niobium (Nb), hafnium (Hf), aluminum (Al) and chromium (Cr);
- and
- thermally treating the cobalt-iron alloy sputtering target by heating the cobalt-iron alloy sputtering target to between 800° C.˜1200° C. to obtain a cobalt-iron alloy sputtering target with high PTF.
A cobalt-iron alloy sputtering target manufactured by a method comprising steps of:
- providing a cobalt-iron alloy sputtering target made by melting and casting process and consisting of cobalt (Co), iron (Fe) and additive metal, wherein the cobalt has an increased pass through flux (PTF) content in the cobalt-iron alloy sputtering target and the additive metal has a content from 8 at %˜20 at % and is at least one metal selected from the group consisting of tantalum (Ta), zirconium (Zr), niobium (Nb), hafnium (Hf), aluminum (Al) and chromium (Cr);
- and
- thermally treating the cobalt-iron alloy sputtering target by heating the cobalt-iron alloy sputtering target to between 800° C.˜1200° C. to obtain the cobalt-iron alloy sputtering target with high PTF.
Dependencies are inferred from the claim text.