Back to results
US 2010/0300875 A1Published application
Magnetic particle trapper for a disk sputtering system
AssigneeWD Media, LLC
InventorsJINLIANG CHEN, KINYA NIPPA
Life of this patent
Estimating the term…
Abstract
A magnetic particle trapper for use in a sputtering system includes a roller cover plate having a plurality of openings arranged and dimensioned to accommodate a plurality of rollers associated with a mechanical transport mechanism of the sputtering system, and a plurality of magnets to trap magnetic particles, the plurality of magnets being attached to the roller cover plate in locations proximate to the plurality of openings.
Claims13
A magnetic particle trapper for use in a sputtering system, comprising:
- a roller cover plate having a plurality of openings arranged and dimensioned to accommodate a plurality of rollers associated with a mechanical transport mechanism of the sputtering system;
- and
- a plurality of magnets to trap magnetic particles, the plurality of magnets being attached to the roller cover plate in locations proximate to the plurality of openings.
Dependencies are inferred from the claim text.