Acceleration sensor
AssigneeRobert Bosch GmbH
InventorJochen REINMUTH
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AssigneeRobert Bosch GmbH
InventorJochen REINMUTH
Estimating the term…
A micromechanical acceleration sensor includes a substrate with a substrate surface arranged in one plane, a first counter-electrode arranged on the substrate surface, a second counter-electrode arranged on the substrate surface, and a rocking mass arranged above the first counter-electrode and the second counter-electrode. The rocking mass is in this case connected to the substrate via a torsion spring which permits tilting of the rocking mass about an axis of rotation. Further provided are a first compensation counter-electrode arranged on the substrate surface and a second compensation counter-electrode arranged on the substrate surface. In addition, a first compensation electrode is arranged above the first compensation counter-electrode and a second compensation electrode is arranged above the second compensation counter-electrode.
A micromechanical acceleration sensor, comprising:
A method for operating a micromechanical acceleration sensor, the method comprising:
Dependencies are inferred from the claim text.