Fluidized bed process for synthesizing trichlorosilane and a trichlorosilane synthesizer
AssigneeProcedyne Corp.
InventorsH. Kenneth STAFFIN, Thomas R. Parr
Life of this patent
Estimating the term…
Loading patent…
AssigneeProcedyne Corp.
InventorsH. Kenneth STAFFIN, Thomas R. Parr
Estimating the term…
A multi-stage fluidized bed synthesizer and process for synthesizing trichlorosilane wherein silicon particles can be fed into one of multiple intercommunicating fluidizing zones in a fluidized bed reactor supplied with fluidizing gas comprising hydrogen chloride. The fluidizing zones can be disposed laterally adjacent one to another, for example side-by-side, or in a horizontal line. Useful embodiments include: feeding the fluidizing gas at different rates and/or compositions to the different fluidizing zones; filtration apparatus to filter the gaseous product and return silicon particles to the reactor and cooling systems for cooling the fluidized bed and the gas volumes above the fluidized beds, if present.
A multi-stage fluidized bed process for synthesizing trichlorosilane comprising:
4-8. (canceled)
10-16. (canceled)
(canceled)
20-23. (canceled)
(canceled)
27-34. (canceled)
A fluidized bed process for synthesizing trichlorosilane, the process comprising:
37-38. (canceled)
A trichlorosilane synthesizer for synthesizing trichlorosilane the trichlorosilane synthesizer comprising:
41-44. (canceled)
(canceled)
(canceled)
51-55. (canceled)
58-59. (canceled)
61-66. (canceled)
A trichlorosilane synthesizer for synthesizing trichlorosilane, the trichlorosilane synthesizer comprising:
68-72. (canceled)
Dependencies are inferred from the claim text.