Substrate processing apparatus and substrate transport method
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorIchiro Mitsuyoshi
Life of this patent
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Abstract
A substrate processing apparatus includes: a plurality of substrate processing sections arranged alongside a transport passage; a standby mechanism which retains a substrate in standby, the standby mechanism being movable along the transport passage; a transport mechanism which transports the substrate between the standby mechanism and each of the substrate processing sections, the transport mechanism being movable along the transport passage; a first movement mechanism which moves the transport mechanism along the transport passage; and a second movement mechanism which moves the standby mechanism along the transport passage.
Claims19
A substrate processing apparatus comprising:
- a plurality of substrate processing sections arranged alongside a transport passage;
- a standby mechanism which retains a substrate in standby, the standby mechanism being movable along the transport passage;
- a transport mechanism which transports the substrate between the standby mechanism and each of the substrate processing sections, the transport mechanism being movable along the transport passage;
- a first movement mechanism which moves the transport mechanism along the transport passage;
- and
- a second movement mechanism which moves the standby mechanism along the transport passage.
A substrate transport method comprising:
- a standby mechanism moving step of moving a standby mechanism along a predetermined transport passage provided alongside a plurality of substrate processing sections, the standby mechanism being adapted to retain a substrate in standby;
- a transport mechanism moving step of moving transport mechanism along the transport passage, the transport mechanism being adapted to transport the substrate;
- and
- a transporting step of causing the transport mechanism to transport the substrate between any of the substrate processing sections and the standby mechanism.
Dependencies are inferred from the claim text.