Exposure system, method of testing exposure apparatus, and method of manufacturing device
AssigneeCanon Kabushiki Kaisha
InventorTakashi Ito
Life of this patent
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Abstract
An exposure system is configured to update control software installed on an exposure apparatus to new control software. The exposure system comprises: at least one exposure apparatus; a simulator configured to test an operation of the exposure apparatus; an output unit configured to output configuration information of the exposure apparatus, which includes information representing a temporal change of the exposure apparatus; a reflecting unit configured to reflect the temporal change of the exposure apparatus on the simulator based on the configuration information output from the output unit; and an updating unit configured to update control software installed on the simulator to new control software.
Claims8
An exposure system configured to update control software installed on an exposure apparatus to new control software, the system comprising:
- at least one exposure apparatus;
- a simulator configured to test an operation of said exposure apparatus;
- an output unit configured to output configuration information of said exposure apparatus, which includes information representing a temporal change of said exposure apparatus;
- a reflecting unit configured to reflect the temporal change of said exposure apparatus on said simulator based on the configuration information output from said output unit;
- and
- an updating unit configured to update control software installed on said simulator to new control software.
A method of testing updating of control software installed on an exposure apparatus to new control software, the method comprising:
- outputting configuration information of the exposure apparatus, which includes information representing a temporal change of the exposure apparatus;
- reflecting the temporal change of the exposure apparatus on a state of one of a simulator and a test exposure apparatus, which tests an operation of the exposure apparatus, based on the configuration information output in the outputting the configuration information;
- updating control software installed on one of the simulator and the test exposure apparatus to new control software;
- and
- testing the updating to the new control software by exposure operations of one of the simulator and the test exposure apparatus, which has the control software updated to the new control software and on which the temporal change is reflected.
A method of manufacturing a device, the method comprising:
- exposing a substrate using an exposure apparatus included in an exposure system;
- developing the exposed substrate;
- and
- processing the developed substrate to manufacture the device, wherein
- the exposure system is configured to update control software installed on the exposure apparatus to new control software, and
- the exposure system comprises
- a simulator configured to test an operation of the exposure apparatus,
- an output unit configured to output configuration information of the exposure apparatus, which includes information representing a temporal change of the exposure apparatus,
- a reflecting unit configured to reflect the temporal change of the exposure apparatus on the simulator based on the configuration information output from the output unit, and
- an updating unit configured to update control software installed on the simulator to new control software.
Dependencies are inferred from the claim text.