Harmonic cmut devices & fabrication methods

In a forward or side looking catheter device having a plurality of cMUT arrays for transmitting and receiving ultrasonic energy, the forward looking intravascular device comprising:

• a plurality of cMUT arrays being disposed on a substrate in a spaced apart arrangement so that the cMUT arrays are disposed at differing locations,
• the plurality of cMUT arrays each comprising a plurality of cMUT elements, wherein at least some of the plurality of cMUT elements comprise a flexible membrane disposed above the membrane and a membrane frequency adjustor for adjusting a vibration mode of the membrane.

A cMUT-based device configured as a forward or side looking intravascular ultrasonic array device that comprises a plurality of cMUT devices, the forward or side looking ultrasonic array device comprising:

• a plurality of cMUT devices formed in a plurality of array portions, the array portions being disposed at differing locations of a substrate that carries the cMUT devices;
• and
• at least a portion of the cMUT devices comprising a membrane that defines a cavity situated between the membrane and the substrate, and wherein a mass load is disposed proximate the membrane, the mass load being configured to adapt the membrane to receive energy at a predetermined frequency.