Positive resist composition and method of forming resist pattern
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorMasaru Takeshita
Life of this patent
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Abstract
A positive resist composition including a resin component (A) which exhibits increased alkali solubility under action of acid and an acid-generator component (B) which generates acid upon exposure, the resin component (A) including: a polymer (A1) including a structural unit (a0) represented by general formula (a0) shown below and no structural unit (a1) derived from an acrylate ester containing an acetal-type acid dissociable, dissolution inhibiting group, exclusive of the structural unit (a0), and a polymer (A2) including the structural unit (a1) and no structural unit (a0).
Claims7
A positive resist composition comprising a resin component (A) which exhibits increased alkali solubility under action of acid and an acid-generator component (B) which generates acid upon exposure,
- said resin component (A) comprising:
- a polymer (A1) comprising a structural unit (a0) represented by general formula (a0) shown below and no structural unit (a1) derived from an acrylate ester containing an acetal-type acid dissociable, dissolution inhibiting group, exclusive of said structural unit (a0), and
- a polymer (A2) comprising said structural unit (a1) and no structural unit (a0):
- wherein R represents a hydrogen atom, a halogen atom, a lower alkyl group or a halogenated lower alkyl group;
- Y1 represents an aliphatic cyclic group;
- Z represents a tertiary alkyl group-containing group or an alkoxyalkyl group;
- a represents an integer of 1 to 3, and b represents an integer of 0 to 2, with the proviso that a+b=1 to 3;
- and each of c, d and e independently represents an integer of 0 to 3.
Dependencies are inferred from the claim text.