Electron beam vapor deposition apparatus for depositing multi-layer coating
OwnerJames W. Nealinventor
Life of this patent
Estimating the term…
Abstract
A physical vapor deposition apparatus includes first and second chambers. A first directed vapor deposition crucible is at least partially within the first chamber for presenting a first source material to be deposited on a work piece. A second directed vapor deposition crucible is at least partially within the second chamber for presenting a second, different source material to be deposited as a second coating on the work piece. At least one of the materials may be deposited as a coating.
Claims20
A vapor deposition apparatus comprising:
- first and second chambers;
- a first directed vapor deposition (DVD) crucible at least partially within the first chamber for presenting a first source material to be deposited on a work piece;
- and
- a second DVD crucible at least partially within the second chamber for presenting a second, different source material to be deposited on the work piece.
A physical vapor deposition apparatus comprising:
- a first chamber having a first coating zone for depositing a first coating on a work piece;
- a second coating chamber adjacent the first coating chamber and having a second coating zone for depositing a second, different coating on the work piece;
- first and second electron beam sources arranged to emit electron beams within, respectively, the first coating chamber and the second coating chamber;
- a first directed vapor deposition (DVD) crucible at least partially within the first coating chamber for receiving a first source material;
- a second DVD crucible at least partially within the second coating chamber for receiving a second source material;
- at least one gas source for providing a carrier gas adjacent to the first DVD crucible and the second DVD crucible;
- a transport for moving the work piece between the first coating chamber and the second coating chamber;
- and
- a controller configured with first control parameters that control deposition of the first coating and second control parameters that control deposition of the second coating, wherein at least one control parameter is different between the first control parameters and the second control parameters.
The apparatus as recited in 11, wherein each of the first DVD crucible and the second DVD crucible includes a gas inlet port, a heating zone for presenting the corresponding first source coating material or second source coating material, a flow passage exposed to the heating zone and fluidly connected with the inlet port, and a nozzle portion including an outlet orifice fluidly connected with the flow passage for jetting a coating stream from the outlet orifice.
A method for use with a physical vapor deposition apparatus, the method comprising:
- depositing a first material on a work piece using a first directed vapor deposition (DVD) crucible that is at least partially within a first chamber;
- and
- depositing a second, different material on the work piece using a second DVD crucible that is at least partially within a second chamber that is adjacent to the first chamber.
Dependencies are inferred from the claim text.