Substrate exchanging mechanism and method of exchanging substrates

A substrate exchanging mechanism that exchanges substrates between a load lock chamber and a transfer apparatus of a substrate process apparatus, the substrate exchanging mechanism comprising:

• a first supporting member fixedly provided in the load lock chamber and configured to be capable of supporting a first substrate;
• a second supporting member, capable of vertical movement, in the load lock chamber and configured to be capable of supporting a second substrate;
• and
• a first transferring member and a second transferring member that are provided in the transfer apparatus in order to transfer a substrate, and configured to be movable into the load lock chamber and vertically movable,
• wherein the first supporting member and the first transferring member are configured so that the first transferring member is moved in a first direction of upward and downward directions in the load lock chamber, thereby transferring the first substrate between the first supporting member and the first transferring member, and
• wherein the second supporting member and the second transferring member are configured to move in the first direction in at least an overlapping period of time so that vertical positions of the first supporting member and the first transferring member are reversed, thereby transferring the second substrate between the first supporting member and the first transferring member.