Data verification method, data verification device, and data verification program

A data verification device comprising:

• an extraction part that extracts a first graphic included in a first reference frame set to correspond to a reference coordinate from a first circuit pattern, extracts a second graphic included in a second reference frame set to correspond to the reference coordinate from the first circuit pattern from a second circuit pattern, extracts a third graphic included in the first reference frame, and extracts a fourth graphic included in the second reference frame from the second circuit pattern, the second circuit pattern being in a layer different than a layer including the first circuit pattern;
• a comparison part that performs coordinate transformation on the first graphic, compares the first graphic having undergone the coordinate transformation with the second graphic, performs the coordinate transformation on the third graphic, and compares the third graphic having undergone the coordinate transformation with the fourth graphic;
• a grouping part that performs grouping for the first and second graphics and sets the first graphic as a first representative graphic when matching of the first graphic having undergone the coordinate transformation and the second graphic is determined, and when matching of the third graphic having undergone the coordinate transformation and the fourth graphic is determined;
• and
• a verification part that verifies a shape of the first circuit pattern based on the first representative graphic.

A computer-readable recording medium storing a program, the program causing the computer to execute:

• extracting a first graphic included in a first reference frame set to correspond to a reference coordinate and a second graphic included in a reference frame set to correspond to the reference coordinate, from a first circuit pattern;
• extracting a third graphic included in the first reference frame and a fourth graphic included in the second reference frame from a second circuit pattern, the second circuit pattern being in a layer different than a layer including the first circuit pattern;
• performing coordinate transformation on the first graphic;
• comparing the first graphic having undergone the coordinate transformation with the second graphic;
• performing the coordinate transformation on the third graphic;
• comparing the third graphic having undergone the coordinate transformation with the fourth graphic;
• performing grouping for the first and second graphics and setting the first graphic as a first representative graphic when matching of the first graphic having undergone the coordinate transformation and the second graphic is determined, and matching of the third graphic having undergone the coordinate transformation and the fourth graphic is determined;
• and
• verifying a shape of the first circuit pattern based on the first representative graphic.