Inspection device for disk-shaped substrate

An inspection apparatus of a disk-shaped substrate having film layers formed on its surface, which has

• an image capturing unit having individual capturing view fields each of which includes one of a plurality of surfaces continuous along a direction traversing a circumferential direction at the outer circumference part of said disk-shaped substrate, successively capturing images of said plurality of surfaces in the circumferential direction of said disk-shaped substrate, and outputting image signals and
• an image processor processing the image signals successively output from said image capturing unit;
• said image processor having
• an image data generating means for generating captured image data expressing a captured image corresponding to each of said capturing view fields respectively including said plurality of surfaces extending corresponding to the circumferential direction of said disk-shaped substrate based on said image signals,
• a correcting means for correcting said captured image data expressing the captured image so that longitudinal direction positions at corresponding positions along said circumferential direction of respective pixel points are expressed with reference to longitudinal direction positions showing positions in a direction traversing said circumferential direction at respective positions along said circumferential direction of a boundary line between a surface image part corresponding to the surface on said captured image corresponding to each of the capturing view fields respectively including said plurality of surfaces and an outer image part at one side adjoining said surface,
• an image combining means for using said corrected captured image data expressing the captured image corresponding to each of the capturing view fields respectively including said plurality of surfaces, and generating image data expressing a composite image in which said plurality of surface image parts corresponding to said plurality of surfaces are combined so that their corresponding boundary lines are matched, in which composite image longitudinal direction positions at corresponding positions along said circumferential direction of the respective pixel points are determined with reference to longitudinal direction positions at respective positions along said circumferential direction of a reference boundary line, the boundary line on the captured image corresponding to a capturing view field including a predetermined surface of said plurality of surfaces being used as the reference boundary line, and
• a film layer edge position information generating means for generating film layer edge position information showing longitudinal direction positions at different positions along said circumferential direction of edge lines of film layer image parts corresponding to said film layers on said composite image,
• said film layer edge position information being able to be used to evaluate positions of formation of said film layers at said disk-shaped substrate.

An inspection apparatus of a disk-shaped substrate having

• an image capturing unit having individual capturing view fields each of which includes one of a plurality of surfaces contiguous along a direction traversing a circumferential direction at the outer circumference part of said disk-shaped substrate, successively capturing images of said plurality of surfaces in a circumferential direction of said disk-shaped substrate, and outputting image signals and
• an image processor processing the image signals successively output from said image capturing unit;
• said image processor having
• an image data generating means for generating captured image data expressing a captured image corresponding to each of said capturing view field respectively including said plurality of surfaces extending corresponding to the circumferential direction of said disk-shaped substrate based on said image signals,
• an image combining means for using said captured image data expressing the captured image corresponding to each of the capturing view fields respectively including said plurality of surfaces to generate composite image data expressing a composite image of the plurality of surface image parts corresponding to said plurality of surfaces combined so that their corresponding boundary lines match, and
• an output control means for displaying said composite image on a display unit based on said composite image data.