Substrate Handling Structure

A substrate handling structure for an imaging optical system that images a single reticle to a pair of imaging locations, comprising

• a pair of coarse stages, each of which is associated with a respective one of the imaging locations, and at least two fine stages, each fine stage configured to support a substrate, the coarse and fine stages configured such that
• a fine stage is supported by a coarse stage at one imaging location,
• the fine and coarse stages can be moved together over a limited range of movement of the coarse stage at the one imaging location, and
• the fine stage is separable from the coarse stage and moveable along a predetermined path;
• and
• a track that is oriented to engage a fine stage that separates from a coarse stage at the one imaging location and guides the fine stage along the predetermined path to the other coarse stage at the other imaging location.

A substrate handling structure for an imaging optical system that images a single reticle to a pair of imaging locations, comprising

• a coarse stage associated with the pair of imaging location and at least two fine stages, both of which are periodically associated with the coarse stage, where each fine stage is configured to support a substrate, the coarse and fine stages configured such that
• the fine stages are spaced apart by a distance that enables substrates on both fine stages to be simultaneously imaged at the pair of imaging locations, and
• the fine and coarse stages can be moved together over a limited range of movement of the coarse stage to position substrates on both fine stages relative to the pair of imaging locations, and
• each of fine stages can be individually moved relative to the coarse stage in a manner that enables the fine stages to be individually repositioned relative to the pair of imaging locations.