Test apparatus, calibration method, program, and recording medium

A method for calibrating a test apparatus that tests a device under test, comprising:

• providing the test apparatus with:
• a driver that outputs a signal to a transmission line that is to be connected to the device under test;
• a comparator that compares a level of the signal transmitted on the transmission line to a set reference level;
• and
• a judging section that judges acceptability of the device under test based on a measurement result, obtained by the comparator, of a response
• signal from the device under test;
• and
• when (i) sequentially outputting a rising waveform and a falling waveform from the driver, with an end of the transmission line on the device under test side connected to a prescribed potential, and detecting a difference between a response time of the comparator for the rising waveform and a response time of the comparator for the falling waveform, based on measurement results, obtained by the comparator, of the waveforms and corresponding reflected waveforms, (ii) calculating a difference between output characteristics of the rising waveform and the falling waveform output from the driver, based on the measurement results from the comparator of the waveforms and the corresponding reflected waveforms, and correcting a difference between the response times of the comparator based on the difference between the output characteristics.

A program causing a computer to function as a calibration apparatus that calibrates a test apparatus for testing a device under test, wherein

• the test apparatus includes:
• a driver that outputs a signal to a transmission line that is to be connected to the device under test;
• a comparator that compares a level of the signal transmitted on the transmission line to a set reference level;
• and
• a judging section that judges acceptability of the device under test based on a measurement result, obtained by the comparator, of a response signal from the device under test,
• the program causes the computer to function as a response characteristic detecting section that, with an end of the transmission line on the device under test side connected to a prescribed potential, sequentially outputs a rising waveform and a falling waveform from the driver, and that detects a difference between a response time of the comparator for the rising waveform and a response time of the comparator for the falling waveform, based on measurement results, obtained by the comparator, of the waveforms and corresponding reflected waveforms, and
• the program causes the response characteristic detecting section to calculate a difference between output characteristics of the rising waveform and the falling waveform output from the driver, based on the measurement results from the comparator of the waveforms and the corresponding reflected waveforms, and to correct a difference between the response times of the comparator based on the difference between the output characteristics.