Surface Acoustic Wave Device and Method for Production of Same

A method of manufacturing a surface acoustic wave device, comprising:

• a pattern forming step of forming, on one major surface of a certain piezoelectric substrate, an IDT comprising at least one comb-shaped electrode with a plurality of electrode fingers extending in a longitudinal direction which is perpendicular to the direction of propagation of the surface acoustic wave;
• an accommodating space forming step of forming a protective cover, at least a part of which is formed by exposing and developing a photocurable material comprising an acid generator containing fluorine and which covers the formation region of the IDT on the one major surface so as to form a hollow accommodating space with the one major surface;
• and
• a through hole forming step of forming a through hole in the protective cover, for communicating the accommodating space with outside.