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US 2010/0244116 A1Published application
Method of forming an eeprom device and structure therefor
AssigneeSemiconductor Components Industries, LLC
InventorsJohn J. Naughton, Matthew Tyler
Life of this patent
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Abstract
In one embodiment, an EEPROM device is formed to include a metal layer having an opening therethrough. The opening overlies a portion of a floating gate of the EEPROM device.
Claims20
An EEPROM cell comprising:
- a semiconductor substrate having a channel region of a first transistor formed thereon;
- a floating gate having a bit storage section, and also having a gate electrode overlying a portion of the channel region, the bit storage section having an outer edge;
- a control gate overlying the floating gate, the control gate having an outer edge that extends a first distance past the outer edge of the bit storage section of the floating gate;
- a metal layer overlying a first portion of the control gate and extending to overlap the first portion of the control gate by a second distance beyond the outer edge of the control gate;
- and
- an opening through the metal layer, the opening overlying the bit storage section wherein an outer edge of the opening is spaced a third distance past the outer edge of the bit storage section and wherein the opening overlies a second portion of the control gate.
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Dependencies are inferred from the claim text.