Group III nitride compound semiconductor light emitting element and manufacturing method thereof
AssigneeToyoda Gosei Co., Ltd.
InventorsYoshiki Saito, Yasuhisa Ushida
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AssigneeToyoda Gosei Co., Ltd.
InventorsYoshiki Saito, Yasuhisa Ushida
Estimating the term…
A group III nitride compound semiconductor light emitting element comprising: a first layer which is a single crystal layer of a group III nitride compound semiconductor, the first layer formed on the buffer layer and including a threading dislocation; a second layer of a group III nitride compound semiconductor formed on the first layer, the second layer including a pit and a flat portion, wherein the pit continuing from the threading dislocations and having a cross section parallel to the substrate expanding in a growth direction of the second layer; a luminescent layer including a flat portion and a pit corresponding to those of the second layer. The indium concentration in the pit of the luminescent layer is smaller than that in the flat portion of the luminescent layer. A luminescent spectrum width of thereof is expanded as compared to a case where the pit does not exist.
A group III nitride compound semiconductor light emitting element, which having a luminescent layer formed from a group III nitride compound semiconductor containing at least indium, comprising:
A manufacturing method of a group III nitride compound semiconductor light emitting element, which having an luminescent layer formed from a group III nitride compound semiconductor including at least indium, comprising:
Dependencies are inferred from the claim text.