Hybrid vertical cavity light emitting sources and processes for forming the same
AssigneesWisconsin Alumni Research Foundation, Board of Regents, The University of Texas System
InventorsZhenqiang Ma, Weidong Zhou
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Abstract
Vertical cavity light emitting sources that utilize patterned membranes as reflectors are provided. The vertical cavity light emitting sources have a stacked structure that includes an active region disposed between an upper reflector and a lower reflector. The active region, upper reflector and lower reflector can be fabricated from single or multi-layered thin films of solid states materials (“membranes”) that can be separately processed and then stacked to form a vertical cavity light emitting source.
Claims24
A vertical cavity light emitting source comprising:
- (a) a lower reflector comprising a first patterned membrane comprising an array of holes;
- (b) an active region disposed over the lower reflector and spaced from the lower reflector by at least one electrically conductive contact;
- and
- (c) an upper reflector comprising a second patterned membrane comprising an array of holes disposed over the active region and spaced from the active region by at least one electrically conductive contact.
A vertical cavity light emitting source comprising:
- (a) a lower reflector comprising a first patterned membrane comprising an array of holes patterned into a layer of Group IV semiconductor;
- (b) an active region comprising a Group III-V semiconductor disposed over the lower reflector;
- and
- (c) an upper reflector comprising a second patterned membrane comprising an array of holes patterned into a layer of Group IV semiconductor disposed over the active region.
A light emitting source array comprising a plurality of vertical cavity light emitting sources on a substrate, the vertical cavity light emitting sources comprising:
- (a) a lower reflector comprising a first patterned membrane comprising an array of holes;
- (b) an active region disposed over the lower reflector and spaced from the lower reflector by at least one electrically conductive contact;
- and
- (c) an upper reflector comprising a second patterned membrane comprising an array of holes disposed over the active region and spaced from the active region by at least one electrically conductive contact.
A light emitting source array comprising a plurality of vertical cavity light emitting sources on a silicon wafer, the vertical cavity light emitting sources comprising:
- (a) a lower reflector comprising a first patterned membrane comprising an array of holes;
- (b) an active region disposed over the lower reflector;
- and
- (c) an upper reflector comprising a second patterned membrane comprising an array of holes disposed over the active region;
- wherein different vertical cavity light emitting sources in the array are configured to emit light at different wavelengths.
A method for making a vertical cavity light emitting source, the method comprising bonding an active region to a lower reflector comprising a first patterned membrane comprising an array of holes and bonding an upper reflector comprising a second patterned membrane comprising an array of holes to the active region.
Dependencies are inferred from the claim text.