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US 2010/0171093 A1Published application
Controlled Growth of a Nanostructure on a Substrate, and Electron Emission Devices Based on the Same
AssigneeSmoltek AB
InventorMohammad Shafiqul Kabir
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Abstract
The present invention provides for an array of nanostructures grown on a conducting substrate. The array of nanostructures as provided herein is suitable for manufacturing electronic devices such as an electron beam writer, and a field emission device.
Claims19
An array of nanostructures supported on a conducting substrate, wherein each nanostructure in the array comprises:
- a plurality of intermediate layers between the conducting substrate and the nanostructure, wherein the plurality of intermediate layers include at least one layer that affects a morphology of the nanostructure and at least one layer to affect an electrical property of an interface between the conducting substrate and the nanostructure, wherein at least two of the plurality of intermediate layers are interdiffused, wherein material of the at least two of the plurality of intermediate layers that are interdiffused are present in the nanostructure.
An electron beam writer, comprising:
- a nanostructure having a base and a tip, wherein the base is affixed to a first electrode;
- a plurality of second electrodes disposed around the nanostructure;
- and
- electrical circuitry that connects the first electrode to the plurality of second electrodes, and is configured to:
- cause a voltage difference to arise between the first electrode and the plurality of second electrodes;
- cause electrons to be emitted from the tip;
- and
- cause the tip to move in space towards one of the plurality of second electrodes.
5 more elements
A field emission device, comprising:
- a plurality of pixels, wherein each pixel comprises:
- a conducting substrate;
- a plurality of nanostructures deposited on the conducting substrate, wherein a plurality of intermediate layers between the nanostructures and the conducting substrate includes at least one layer of semiconducting material;
- and wherein the conducting substrate forms an electrode that is in electrical communication with a voltage source and second electrode;
- and wherein the second electrode has a coating of phosphor;
- and
- wherein upon application of a voltage between the conducting substrate and the second electrode, the nanostructures emit electrons towards the phosphor coating.
4 more elements
Dependencies are inferred from the claim text.