Extracting Consistent Compact Model Parameters for Related Devices

An apparatus comprising:

• a processor;
• and
• program code configured to be executed by the processor to extract parameters for compact models for semiconductor devices, the program code configured to define a first set of parameters associated with first and second semiconductor devices that have the same value for all devices, define a second set of parameters associated with the first and second semiconductor devices, wherein the values of the second set of parameters differ among the devices, measuring data from the first and second semiconductor devices related to the first and second set of parameters, establish a mathematical relationship between the measured data, and adjust values of the second set of parameters to fit the established mathematical relationship.

A program product, comprising:

• a computer readable medium;
• and
• a program code configured to extract parameters for compact models for semiconductor devices, the program code resident on the computer readable medium and configured to measure physical data from a first semiconductor device, measure physical data from a second semiconductor device, correlate the measured physical data from the first semiconductor device with the measured physical data from the second semiconductor device to create a data set for parameter extraction, extract parameters from the data set related to the first semiconductor device, and extract parameters from the data set related to the second semiconductor device.