Modeling structure for simulation of trapezoidal metal line
OwnerChan Ho Park, Won Young Jung +1inventors
InventorsChan Ho Park, Won Young Jung, Sung Gon Cho
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Abstract
Embodiments relate to a semiconductor technology, and more particularly, to a modeling structure for simulation of a trapezoidal metal line. The modeling structure for simulation of a trapezoidal metal line includes a top step with a width A, a bottom step with a width B, a middle step with a width equal to an average of the width A and the width B, and a total height C, wherein the middle step has a height equal to a value obtainable by subtracting both a height of the top step and a height of the bottom step from the total height C.
Claims20
A modeling structure for simulation of a trapezoidal metal line comprising:
- a top step with a width A;
- a bottom step with a width B;
- a middle step with a width equal to an average of the width A and the width B;
- and
- a total height C.
A method comprising:
- simulating a trapezoidal metal line using a model structure that includes:
- a top step with a width A;
- a bottom step with a width B;
- a middle step with a width equal to an average of the width A and the width B;
- and
- a total height C.
A system comprising:
- a simulator configured to simulate a trapezoidal metal line using a model structure that includes:
- a top step with a width A;
- a bottom step with a width B;
- a middle step with a width equal to an average of the width A and the width B;
- and
- a total height C.
Dependencies are inferred from the claim text.