Physical quantity detection circuit and physical quantity sensor device

A physical quantity detection circuit used for a physical quantity sensor that vibrates from self-excitation by application of a drive signal to output a monitor signal responsive to the self-excited vibration and also outputs a sensor signal according to a physical quantity given externally, the circuit comprising:

• an analog-to-digital conversion circuit configured to convert the monitor signal and the sensor signal to a digital monitor signal and a digital sensor signal, respectively;
• a correction circuit configured to generate a digital correction signal by adjusting the amplitude of the digital monitor signal and the phase difference between the digital monitor signal and the digital sensor signal and correct the digital sensor signal using the digital correction signal;
• and
• a detector circuit configured to detect a physical quantity signal corresponding to the physical quantity from the digital sensor signal corrected by the correction circuit.