Transport method and transport apparatus

A transport apparatus that transports a pair of substrate holders, which are aligned and stacked by an aligning section and hold substrates to be layered, from the aligning section to a pressure applying section, comprising:

• a control section that (i) judges whether there is a possibility of misalignment greater than or equal to a threshold value occurring between the substrates, the misalignment occurring during transport from the aligning section to the pressure applying section, and (ii) if the judgment indicates the possibility of misalignment, causes the pair of substrate holders to be transported to a region other than the pressure applying section.

A transport method comprising:

• judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates aligned and stacked by an aligning section, the misalignment occurring when the pair of substrates is transported from the aligning section to a pressure applying section;
• and
• if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrates to a region other than the pressure applying section.

A transport apparatus that transports a pair of substrates, which are aligned and stacked by an aligning section, from the aligning section to a pressure applying section, comprising:

• a control section that (i) judges whether there is a possibility of misalignment greater than or equal to a threshold value occurring between the substrates, the misalignment occurring during transport from the aligning section to the pressure applying section, and (ii) if the judgment indicates the possibility of misalignment, causes the pair of substrates to be transported to a region other than the pressure applying section.