Three degree of movement mover and method for controlling a three degree of movement mover
AssigneeNikon Corporation
InventorsMasahiro Totsu, Michael B. Binnard, Scott Coakley
Life of this patent
Estimating the term…
Loading patent…
AssigneeNikon Corporation
InventorsMasahiro Totsu, Michael B. Binnard, Scott Coakley
Estimating the term…
A mover (344) moving a stage (238) along a first axis and about a second axis includes a magnetic component (454), and a conductor component (456). The magnetic component (454) includes one or more magnets (454D) that are surrounded by a magnetic field. The conductor component (456) is positioned near the magnetic component (454) in the magnetic field. Further, the conductor component (456) interacts with the magnetic component (454) when current is directed to the conductor component (456) to generate a controlled force along the first axis, and a controlled moment about the second axis. Additionally, the conductor component (456) interacts with the magnetic component (454) to generate a controlled force along a third axis that is perpendicular to the first axis and the second axis when current is directed to the conductor component (456).
A mover for moving a stage along a first axis, the mover comprising:
A mover for moving a stage along a first axis, the mover comprising:
A method for moving a device along a first axis, the method comprising the steps of:
Dependencies are inferred from the claim text.