Dual path gas distribution device

A method for distributing gases for a deposition process, comprising:

• flowing a first gas through a plurality of recessed channels on a top surface of a plate;
• delivering the first gas to a reaction chamber through a first plurality of thru-holes intersecting the plurality of channels;
• concurrent with flowing the first gas, flowing a second gas through a radial passage defined within the plate;
• directing the second gas from the radial passage to the top surface of the plate;
• and
• introducing the second gas into the reaction chamber from the top surface of the plate via ports extending through the plate.

A method for combinatorial processing, comprising:

• identifying groups of varied combinations of memory materials;
• depositing a portion of the groups of varied combinations onto regions of a substrate through a showerhead having isolated distribution networks for a plurality of fluids, the depositing including;
• flowing the plurality of fluids through the isolated distribution networks, wherein one of the plurality of fluids is dispensed to a top surface of the showerhead prior to exiting from a bottom surface of the showerhead;
• characterizing the varied combinations;
• and
• selecting a subset of the portion of the varied combinations for further evaluation.