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US 2010/0167439 A1Published application
Method of manufacturing printing plate and method of manufacturing liquid crystal display device using the same
AssigneeLG Display Co., Ltd.
InventorsSoon Sung Yoo, Oh Nam Kwon
Life of this patent
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Abstract
A method of manufacturing a precise printing plate, and a method of manufacturing an LCD device using the same are disclosed, the method of manufacturing the precise printing plate comprising forming a mask layer of a predetermined pattern on a substrate; etching the substrate with an etchant including an anionic surfactant by using the mask layer of the predetermined pattern, to thereby form a trench; and removing the mask layer.
Claims8
A method for manufacturing an LCD device comprising:
- preparing at least one printing plate having concave or convex portions, wherein the step of preparing the printing plate comprises:
- sequentially forming a metal layer and a photoresist on a substrate;
- patterning the photoresist by exposure and development;
- etching the metal layer using the patterned photoresist as an etch mask, to thereby form a mask layer having the concave or convex portions;
- and
- removing the patterned photoresist etching the substrate with an etchant including an anionic surfactant using the mask layer as an etch mask, to thereby form at least one trench, wherein the anionic surfactant is adhered to a surface of the mask layer so that the anionic surfactant prevents the at least one trench from being etched horizontally;
- and
- removing the mask layer;
- forming a black matrix layer on a first substrate;
- forming a color filter layer on the first substrate and on a portion of the black matrix layer;
- and
- bonding the first substrate and a second substrate to each other at a predetermined intervals therebetween, wherein at least one of the black matrix layer and the color filter layer is formed using the at least one printing plate.
9 more elements
A method for fabricating an LCD device comprising:
- preparing at least one printing plate having concave or convex portions, wherein the step of preparing the printing plate comprises:
- sequentially forming a metal layer and a photoresist on a substrate;
- patterning the photoresist by exposure and development;
- etching the metal layer using the patterned photoresist as an etch mask, to thereby form a mask layer having the concave or convex portions;
- and
- removing the patterned photoresist etching the substrate with an etchant including an anionic surfactant using the mask layer as an etch mask, to thereby form at least one trench, wherein the anionic surfactant is adhered to a surface of the mask layer so that the anionic surfactant prevents the at least one trench from being etched horizontally;
- and
- removing the mask layer;
- forming a material layer on a TFT substrate, the material layer configured to form a component of the TFT substrate;
- forming a photoresist pattern on the material layer using the at least one printing plate;
- and
- forming the component by etching the material layer using the photoresist pattern as an etching mask.
9 more elements
Dependencies are inferred from the claim text.