Piezoelectric inkjet printhead and method of manufacturing the same

A method of manufacturing a printhead including an upper silicon substrate having an ink inlet and a piezoelectric actuator and a lower silicon substrate having first and second silicon layers separated by an intervening oxide layer, the method comprising:

• forming a manifold, a plurality of pressure chambers, and a plurality of dampers in the second silicon layer of the lower silicon substrate;
• forming a plurality of nozzles in the intervening oxide layer and the first silicon layer of the lower silicon substrate;
• and
• attaching the upper and lower silicon substrates together to form an ink flow path defined by the ink inlet, the manifold, the plurality of pressure chambers, the plurality of dampers, and the plurality of nozzles.

A method of manufacturing a piezoelectric inkjet printhead, the method comprising:

• forming an ink inlet on an upper substrate allow an inflow of ink;
• forming a manifold to connect with the ink inlet, a plurality of pressure chambers arranged along at least one side of the manifold and connected with the manifold, a plurality of dampers connected with the pressure chambers, and a plurality of nozzles connected with the dampers on a lower substrate formed of a silicon-on-insulator substrate;
• and
• forming a piezoelectric actuator on the upper substrate to apply a driving force to the plurality of pressure chambers to eject the ink,
• wherein the upper substrate is stacked and bonded on the lower substrate.