Drying furnace for cated film
AssigneeKabushiki Kaisha Ishihyoki
InventorsTeruyuki Nakano, Yasuhiro Kozawa
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Abstract
In drying of a glass substrate to which a coated film is applied, the heating and drying is conducted while feeding means 10, 18, which always moves on a lower surface of the glass substrate 6 to which the coated film is applied, abuts against the substrate, in order to solve a problem that when the lower surface of the coated film is supported for a long time, supporting traces occur and thereby quality of the glass substrate is reduced. With this configuration, traces of the pin 11, 12, 21 are less likely to occur.
Claims9
A drying furnace for a coated film heating up a substrate of which upper surface is provided with a coated film and drying the coated film, the drying furnace comprising:
- a carrier port of the substrate which is formed on a side surface;
- heating means which heats and dries the coated film of the substrate;
- and
- feeding means which abuts against a lower surface of the substrate and moves an abutment position against the substrate during heating and drying of the coated film.
A drying furnace for a coated film heating up a substrate of which upper surface is provided with a coated film and drying the coated film, wherein
- hot plate heaters are sequentially arranged in an order of hot plate heater, substrate and hot plate heater such that the substrate is sandwiched by the hot plate heaters, and
- a carrier port of the substrate and feeding means are provided between upper and lower hot plate heaters, the feeding means abutting against a lower surface of a glass substrate and moving an abutment position against the substrate at heating and drying of the coated film.
Dependencies are inferred from the claim text.