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US 2010/0167215 A1Published application
Composite substrate and method for forming metal pattern
AssigneeNGK Insulators, Ltd.
InventorsKenji SUZUKI, Yasunori Iwasaki, Takashi Yoshino
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Abstract
A composite substrate 10 is a composite substrate in which a piezoelectric substrate 11 that is transparent to light used for photolithography and a supporting substrate 12 for supporting the piezoelectric substrate 11 are bonded together via an organic adhesive layer 13. At least one of the supporting substrate 12 and the organic adhesive layer 13 of the composite substrate 10 can absorb light used for photolithography.
Claims9
A composite substrate, in which
- a piezoelectric substrate that is transparent to light used for photolithography and a supporting substrate for supporting the piezoelectric substrate are bonded together via an organic adhesive layer,
- wherein at least one of the supporting substrate and the organic adhesive layer can absorb the light used for photolithography.
A composite substrate, comprising:
- a piezoelectric substrate that is transparent to light used for photolithography;
- a supporting substrate that is transparent to the light used for photolithography;
- a first organic adhesive layer that is transparent to the light used for photolithography and bonds the piezoelectric substrate and the supporting substrate together;
- and
- a second organic adhesive layer formed on a surface of the supporting substrate opposite the first organic adhesive layer,
- wherein the second organic adhesive layer can absorb the light used for photolithography.
3 more elements
Dependencies are inferred from the claim text.