Radiation-sensitive insulation resin composition, cured article, and electronic device
AssigneeJsr Corporation
InventorsRyuichi Okuda, Hirofumi Goto
Life of this patent
Estimating the term…
Abstract
A radiation-sensitive insulation resin composition contains (A) an alkali-soluble resin, (B) a crosslinking agent, (C) a radiation-sensitive acid generator, (D) an inorganic filler, and (E) crosslinked rubber particles. The composition can be developed using an alkali developer, does not incur damages in insulating properties and resolution properties, suppresses thermal deformation, and can produce a layer exhibiting excellent adhesion to conductor wiring layers.
Claims9
1-9. (canceled)
A radiation-sensitive insulation resin composition comprising (A) an alkali-soluble resin, (B) a crosslinking agent, (C) a radiation-sensitive acid generator, (D) an inorganic filler, and (E) crosslinked rubber particles, the inorganic filler (D) being inorganic particles having an average particle diameter of 1 to 500 nm.
Dependencies are inferred from the claim text.