Resist underlayer composition and method of manufacturing semiconductor integrated circuit device using the same

A resist underlayer composition, comprising:

• a solvent;
• and
• an organosilane polymer, the organosilane polymer including a repeating unit represented by Chemical Formula 6:
• (SiO1.5-[Ph1]1-SiO1.5)a(Ph2-[Ph1]m-SiO1.5)b(R3—CH2n—SiO1.5)c(R4—SiO1.5)d(SiO1.5—X—SiO1.5)e [Chemical Formula 6]
• wherein, in Chemical Formula 6:
• Ph1 is a substituted or unsubstituted phenylene group,
• Ph2 is a substituted or unsubstituted phenyl group,
• R3 is a substituted or unsubstituted C6 to C12 aryl group,
• R4 is hydrogen or a C1 to C6 alkyl group,
• X is a substituted or unsubstituted linear alkylene group, a substituted or unsubstituted branched alkylene group, or an alkylene group including an alkenylene group, an alkynylene group, a heterocyclic group, an urea group, or an isocyanurate group in its main chain,
• l and m are each independently integers of 1 to 4,
• n is an integer of 0 to 5, and
• a, b, c, d, and e satisfy the relations:
• 0≦a≦0.99, 0≦b≦0.99, 0.01≦a+b≦0.99, 0≦c≦0.99, 0≦d≦0.99, 0≦e≦0.99, 0.01≦c+d+e≦0.99, and a+b+c+d+e=1.

A resist underlayer, comprising:

• an organosilane polymer including a repeating unit represented by Chemical Formula 6:
• (SiO1.5-[Ph1]1-SiO1.5)a(Ph2-[Ph1]m-SiO1.5)b(R3—CH2n—SiO1.5)c(R4—SiO1.5)d(SiO1.5—X—SiO1.5)e [Chemical Formula 6]
• wherein, in Chemical Formula 6:
• Ph1 is a substituted or unsubstituted phenylene group,
• Ph2 is a substituted or unsubstituted phenyl group,
• R3 is a substituted or unsubstituted C6 to C12 aryl group,
• R4 is hydrogen or a C1 to C6 alkyl group,
• X is a substituted or unsubstituted linear alkylene group, a substituted or unsubstituted branched alkylene group, or an alkylene group including an alkenylene group, an alkynylene group, a heterocyclic group, an urea group, or an isocyanurate group in its main chain,
• l and m are each independently integers of 1 to 4,
• n is an integer of 0 to 5, and
• a, b, c, d, and e satisfy the relations:
• 0≦a≦0.99, 0≦b≦0.99, 0.01≦a+b≦0.99, 0≦c≦0.99, 0≦d≦0.99, 0≦e≦0.99, 0.01≦c+d+e≦0.99, and a+b+c+d+e=1.