Nickel oxide film for bolometer and method for manufacturing thereof, and infrared detector using the same
AssigneeKorea Advanced Institute of Science and Technology
InventorsHee-Chul Lee, Dong Soo Kim, Yong-Soo Lee
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Abstract
There are provided a nickel oxide film for a bolometer and a manufacturing method thereof, and an infrared detector using the nickel oxide film. The nickel oxide film has properties with a TCR value greater than −3%/° C., a low noise value, and stable and high reproducibility properties. The nickel oxide film is applicable to manufacturing an infrared detector using a nickel oxide film for a bolometer.
Claims20
A nickel oxide film for a bolometer comprising:
- at least one compound selected from the group consisting of NiOx, Ni1-yO, Ni2O3, Ni(OH)2, NiSiO3, and NiSiO4, wherein x satisfies 1≦x≦20, and y satisfies 0≦y≦0.95.
A method for manufacturing a nickel oxide film for a bolometer comprising the steps of:
- (i) depositing nickel on a substrate;
- and
- (ii) performing a heat treatment for the substrate on which the nickel is deposited in an oxygen atmosphere and forming a nickel oxide film;
- wherein the nickel oxide film includes at least one compound selected from the group consisting of NiOx, Ni1-yO, Ni2O3, Ni(OH)2, NiSiO3, and NiSiO4, wherein x satisfies 1≦x≦20, and y satisfies 0≦y≦0.95.
A method for manufacturing a nickel oxide film for a bolometer comprising the steps of:
- (a) depositing a nickel oxide film on a substrate;
- and
- (b) performing a heat treatment for the substrate on which the nickel oxide film is deposited in a nitrogen or oxygen atmosphere;
- wherein the nickel oxide film includes at least one compound selected from the group consisting of NiOx, Ni1-yO, Ni2O3, Ni(OH)2, NiSiO3, and NiSiO4, wherein x satisfies 1≦x≦20, and y satisfies 0≦y≦0.95.
A method for manufacturing a nickel oxide film for a bolometer comprising the step of (a) depositing a nickel oxide film on a substrate;
- wherein the nickel oxide film includes at least one compound selected from the group consisting of NiOx, Ni1-yO, Ni2O3, Ni(OH)2, NiSiO3, and NiSiO4, wherein x satisfies 1≦x≦20, and y satisfies 0≦y≦0.95.
An infrared detector comprising a bolometer, the bolometer including a nickel oxide film comprising:
- at least one compound selected from the group consisting of NiOx, Ni1-yO, Ni2O3, Ni(OH)2, NiSiO3, and NiSiO4, wherein x satisfies 1≦x≦20, and y satisfies 0≦y≦0.95.
Dependencies are inferred from the claim text.