Process for production a thin glasslike coating on substrates for reducing gas permeation

Abstract

A method for producing a glassy, transparent coating on a substrate by coating the substrate with a solution containing a) a polysilazane of the formula —(SiR′R″—NR′″)n— where R′, R″, R′″ are identical or different and independently represent hydrogen or an optionally substituted alkyl radical, aryl radical, vinyl radical or (trialkoxysilyl)alkyl radical, n being an integer and or being calculated such that the polysilazane has a number-average molecular weight of from 150 to 150 000 g/mol, and b) a catalyst in an organic solvent, removing the solvent using evaporation such that a polysilazane layer having a layer thickness of 0.05-3.0 μm remains on the substrate, and irradiating the polysilazane layer with VUV radiation having wavelength portions <230 nm and UV radiation having wavelength portions between 230 and 300 nm in an atmosphere containing steam in the presence of oxygen, active oxygen and optional nitrogen.

Dependencies are inferred from the claim text.