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US 2010/0166360 A1Published application
Acid block for hybrid silicon device processing compatible with low-loss waveguides
OwnerRichard Jones, Alexander W. Fanginventors
Life of this patent
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Abstract
An acid-stop structure for a rib waveguide comprises a fin structure formed between the sidewalls in each rib channel of the rib waveguide, thereby preventing acids and other etchants from flowing down the rib channel and under a die that has been bonded to a wafer.
Claims16
A device, comprising:
- a waveguide comprising a rib structure between a first waveguide channel and a second waveguide channel, the first waveguide channel comprising a first sidewall and a second sidewall, the first sidewall of the first waveguide channel comprising a sidewall of the rib structure;
- and
- at least one fin structure formed between the first sidewall and the second sidewall of the first waveguide channel, the fin structure comprising a height that is substantially equal to a height of the first sidewall and the second sidewall.
A hybrid optical device, comprising:
- a silicon-on-insulator substrate comprising at least one waveguide, the waveguide comprising a rib structure between a first waveguide channel and a second waveguide channel, the first waveguide channel comprising a first sidewall and a second sidewall, the first sidewall of the first waveguide channel comprising a sidewall of the rib structure, and at least one fin structure formed between the first sidewall and the second sidewall of the first waveguide channel, the second waveguide channel comprising a first sidewall and a second sidewall, the first sidewall of the second waveguide channel comprising a sidewall of the rib structure, and at least one fin structure formed between the first sidewall and the second sidewall of the second waveguide channel;
- and
- a III-V die bonded to the silicon-on-insulator substrate, the III-IV die comprising circuitry coupled to at least one waveguide.
Dependencies are inferred from the claim text.