Optical waveguide mode sensor having pores
AssigneeNational Institute of Advanced Industrial Science and Technology
InventorsMakoto Fujimaki, Koichi Awazu
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AssigneeNational Institute of Advanced Industrial Science and Technology
InventorsMakoto Fujimaki, Koichi Awazu
Estimating the term…
A chip is constituted from a transparent substrate, a reflector film formed on the transparent substrate and an optical waveguide layer formed on the reflector film, and a plurality of pores is formed in the optical waveguide layer. A light-introducing mechanism that introduces light from the transparent substrate of the chip onto the reflector film, and a light-detecting mechanism that detects the light reflected on the reflector film are provided. A specimen under investigation is detected by sensing a change in the incidence angle or in the intensity of reflected light that occurs when the specimen is adsorbed or deposits on the surface of the optical waveguide layer, by using a range of incidence angles of the light in which the intensity of reflected light changes when a part or all of the incident light couples with the optical waveguide mode that propagates in the optical waveguide layer.
A optical waveguide mode sensor comprising:
Dependencies are inferred from the claim text.