US 2010/0165451 A1 · OPTICAL DEFLECTOR AND OPTICAL DEFLECTING BOARD

Abstract

An optical deflector includes a substrate, an electrode layer on the substrate, an insulating layer at a predetermined peripheral region on the electrode layer, exposing the central region of the electrode layer. First electrode sandwiched wall is on the insulating layer. Second electrode sandwiched wall is on the insulating layer corresponding to the first electrode sandwiched wall. A pair of insulating walls is between the first electrode sandwiched wall and the second electrode sandwiched wall in enclosing to form an inner space. An outer wall encloses the pair of insulating layers, the first and the second electrode sandwiched walls at outside. A cap layer covers on the outer wall. A first liquid is filled into the inner space in contact with the electrode layer. A second liquid is filled into the inner spacer without solving to each other and forms a liquid interface.

Claims33

Dependent claims

An optical deflector, comprising:

a substrate;
an electrode layer, disposed on the substrate;
an insulating layer, disposed on a predetermined peripheral region of the electrode layer, exposing a central region of the electrode layer;
a first electrode sandwiched wall, disposed on the insulating layer;
a second electrode sandwiched wall, disposed on the insulating layer, corresponding to the first electrode sandwiched wall, wherein an inner space is formed between the first electrode sandwiched wall and the second electrode sandwiched wall;
an outer wall, enclosing the first and the second electrode sandwiched walls at outside;
a cap layer, covering on the outer wall;
a first liquid, filled into the inner space in contact with the electrode layer;
and
a second liquid, filled into the inner spacer without solving with the first liquid to each other and forms a liquid interface.

7 more elements

An optical deflecting panel, comprising:

a substrate;
an electrode layer on the substrate;
an insulating layer on the electrode layer, exposing a plurality of regions of the electrode layer;
a plurality of first electrode sandwiched walls, disposed on the insulating layer;
a plurality of second electrode sandwiched walls, disposed on the insulating layer, opposite to the first electrode sandwiched walls, respectively, to form a plurality of structural units, wherein a plurality of spaces is formed between the first electrode sandwiched walls and the second electrode sandwiched walls;
an outer wall, disposed on the substrate, surrounding the structural units;
a top cap layer, covering over the outer wall;
a first liquid, filled in the inner space of each structural unit and contacts the electrode layer;
and
a second liquid, filled in the inner space of each structural unit and not solved in the first liquid to each other, so as to form a liquid interface.

7 more elements

An optical deflecting panel, comprising:

a first substrate;
a first electrode layer, disposed on the first substrate;
a second substrate;
a second electrode layer, disposed on the second substrate;
a plurality of first electrode sandwiched walls, disposed between the first insulating layer and the second insulating layer;
a plurality of second electrode sandwiched walls, disposed between the first insulating layer and the second insulating layer, respectively against the first electrode sandwiched walls to form a plurality of structural units, wherein each of the structural units has an inner space;
a first liquid, filled in the inner space of each of the structural units;
a second liquid, filled in the inner space of each of the structural units;
a third liquid, filled in the inner space of each of the structural units between the first liquid and the second liquid without solving to each other, so as to form a first liquid interface and a second liquid interface.

6 more elements

Dependencies are inferred from the claim text.

Optical deflector and optical deflecting board

Life of this patent

Optical deflector and optical deflecting board

Life of this patent

Abstract

Claims33