Systems and methods using interferometric optical modulators and diffusers
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorClarence Chui
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Abstract
Various embodiments include interferometric optical modulators comprising a substrate layer having a thickness between about 0.1 mm to about 0.45 mm thick and a method for manufacturing the same. The interferometric modulator can be integrated together with a diffuser in a display device. The thin substrate permits use of a thicker diffuser. The thinner substrate may increase resolution and reduce overall thickness of the inteferometric modulator. The thicker diffuser may provide increased diffusion and durability.
Claims5
A spatial light modulator comprising:
- a substrate having a first side and a second side;
- a plurality of pixels disposed on the first side of the substrate, the plurality of pixels spaced on the first side of the substrate with a pitch, each of the plurality of pixels comprising an interferometric light modulator configured to be individually actuated to modulate light in response to an electrical signal;
- and
- a diffuser disposed on the second side of the substrate,
- wherein the substrate has a thickness between the first side and the second side that is less than approximately the pitch of the plurality of pixels.
A method of forming a spatial light modulator, the method comprising:
- forming a plurality of interferometric light modulating elements having a spatial pitch;
- forming a diffuser spaced apart from the plurality of interferometric light modulating elements by less than approximately the spatial pitch;
- and
- patterning electrodes configured to allow individual electrical actuation of the interferometric light modulating elements.
Dependencies are inferred from the claim text.