US 2010/0165346 A1 · APPARATUS FOR DETECTING A SAMPLE

Abstract

An apparatus for effectively detecting and calibrating a sample of examination system. The apparatus has an optics-electricity assembly for detecting the sample by a light and an elastically supporting assembly for providing motion freedoms to adjust the relative geometric conditions between the optics-electricity assembly and the sample. The elastically supporting assembly has a planer structure and a cubic structure, and provides both motion freedoms on a plane and motion freedoms vertical to the plane. The optics electricity assembly could analyze the received reflected light to get geometric information of the sample, and could adjust the light used to detect the sample.

Claims33

Dependent claims

A system for detecting a sample, comprising:

a holding apparatus for holding a sample;
and
at least one detecting apparatus, each of said detecting apparatus separated from said sample and capable of detecting a geometric condition of said example by projecting a light beam on said sample,
wherein each of said detecting apparatus comprises:
an optics-electricity assembly, said optics-electricity assembly capable of projecting a light beam on said sample, receiving a reflected light beam from said sample and analyzing said reflected light beam;
and
an elastically supporting assembly, said elastically supporting assembly capable of supporting said optic-electricity assembly, fixing said optics-electricity assembly to a base and adjusting a relative geometric relation between said optics-electricity assembly and said sample.

4 more elements

An apparatus for detecting a sample, comprising:

an optics-electricity assembly, said optics-electricity assembly capable of projecting a light beam on a sample, receiving a reflected light beam from said sample and analyzing said reflected light beam;
and
an elastically supporting assembly, said elastically supporting assembly capable of supporting said optic-electricity assembly, fixing said optics-electricity assembly to a base and adjusting the relative geometric relation between said optics-electricity assembly and said sample, said elastically supporting assembly comprising:
a planar structure, said planar structure having holes separately located on at least one edge of said planar structure, wherein the size of each said hole is larger than the size of a body of a fastener passing through said hole and is smaller than the size of an end of said fastener;
and
a cubic structure, said cubic structure contacting with said planar structure, said cubic structure having at least two cavities and at least two adjusting devices, wherein a first cavity having a first opening with a first direction and said second cavity having a second opening with a second direction that is different than said first direction, wherein a first adjusting device is capable of adjusting an angular magnitude of a first angle of said first opening and a second adjusting device is capable of adjusting an angular magnitude of a second angle of said second opening, wherein said cavities are arranged along a specific direction interacting said planar structure and said angular magnitudes are in measured along said specific direction.

3 more elements

An apparatus for detecting a sample, comprising:

an optics-electricity assembly, said optics-electricity assembly capable of projecting a light beam on a sample, receiving a reflected light beam from said sample and analyzing said reflected light beam;
and
an elastically supporting assembly, said elastically supporting assembly capable of supporting said optic-electricity assembly, fixing said optics-electricity assembly to a base and adjusting the relative position between said optics-electricity assembly and said sample;
wherein said optics-electricity assembly comprising:
a light source module, said light source module being capable of emitting said light beam to said sample;
and
an analyzing module, said analyzing module being capable of receiving and analyzing said reflected light beam.

4 more elements

Dependencies are inferred from the claim text.

Apparatus for detecting a sample

Life of this patent

Apparatus for detecting a sample

Life of this patent

Abstract

Claims33